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Goniometers

Smaract Nanometer Precision Piezo Goniometers

Based on our piezo drive technologies, we are offering goniometers with different radii. In addition to their compactness, the goniometers of the SGO-series are very rigid and therefore ideally suited for micro- or nanopositioning tasks. Due to the usage of high precision crossed roller bearings, they provide a high angular accuracy. Our goniometers offer a high resolution of motion and are directly stackable. By combining two goniometers with appropriate radii it is possible to build a compact Euler goniometer with a common center of rotation.

The SmarAct goniometers can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the SGO- series goniometers are available for different environmental conditions, such as high vacuum and ultra high vacuum environments.

SGO-60.5

SGO-60.5
center of rotation

60.5 mm

sensor resolution

down to 0.03 μrad

travel

± 5 °

details

SGO-77.5

SGO-77.5
center of rotation

77.5 mm

sensor resolution

down to 0.03 μrad

travel

± 5 °

details

SGO-93.5

SGO-93.5
center of rotation

93.5 mm

sensor resolution

down to 0.03 μrad

travel

± 5 °

details

Application Example

SmarAct Goniometer Application Example

This 5D manipulator consists of SLC-17 series positioners for x, y and z movement and two goniometers rotating around a common eucentric point. The linear positioners along the z axis are supported by constant force springs, increasing the allowed permanent payload. The manipulator can also be ordered with the -HV or -UHV option making it high and ultra- high vacuum compatible.