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SGO-77.5

SGO-77.5 Nanometer Precision Piezo Goniometer

SGO-77.5

resolution: < 2 μ° (< 0.03 µrad)
normal load: 5 N (500 g)
vacuum: 10-11 mbar
center of rotation: 77.5 mm
rotation: ± 5 °
size: 50 x 50 x 17 mm3

Nanometer Precision Piezo Goniometer

With the SGO-77.5 goniometer the center of rotation is extended to 77.5 mm. It still has very compact dimensions of 50 x 50 x 17 mm³.

Mechanical Properties
blocking torque MB

20 N cm

max. vertical load FN

5 N

lateral torque MR

1.2 N m

positioner dimension

50 x 50 x 17 mm3

center of rotation

77.5 mm

weight

≈ 140 g

Positioning
travel

± 5 °

step width

0.7 – 7 µrad

scan range

10.5 µrad

scan resolution

0.01 µrad

velocity

4 °/s

max. frequency

18.5 kHz

Closed-Loop with -S
sensor resolution

0.03 µrad

Closed-Loop with -M
sensor resolution

1.5 µrad

closed loop resolution

4.5 µrad (H)CU
1.5 µrad MCS

Closed-Loop with -L
sensor resolution

0.12 µrad

closed loop resolution

1.5 µrad (H)CU
0.12 µrad MCS

Materials and Vacuum Options
steel base (-ST)
increased lifte time (-Z)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)
Step FileTechnical Drawing