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SGO-93.5

SGO-93.5 Nanometer Precision Piezo Goniometer

SGO-93.5

resolution: < 2 μ° (< 0.03 µrad)
normal load: 5 N (500 g)
vacuum: 10-11 mbar
center of rotation: 93.5 mm
rotation: ± 5 °
size: 50 x 50 x 17 mm3

Nanometer Precision Piezo Goniometer

The SGO-93.5 is our high-end goniometer with a center of rotation of 93.5 mm. Like all of SmarActs goniometers this can be operated by any of our control units and is also available with integrated positioning sensors or for different enviromental conditions i.e. high vacuum and ultra-high vacuum.

Mechanical Properties
blocking torque MB

20 N cm

max. vertical load FN

5 N

lateral torque MR

1.2 N m

positioner dimension

50 x 50 x 17 mm3

center of rotation

93.5 mm

weight

≈ 140 g

Positioning
travel

± 5 °

step width

0.7 – 7 µrad

scan range

10.5 µrad

scan resolution

0.01 µrad

velocity

4 °/s

max. frequency

18.5 kHz

Closed-Loop with -S
sensor resolution

0.03 µrad

Closed-Loop with -M
sensor resolution

1.5 µrad

closed loop resolution

4.5 µrad (H)CU
1.5 µrad MCS

Closed-Loop with -L
sensor resolution

0.12 µrad

closed loop resolution

1.5 µrad (H)CU
0.12 µrad MCS

Materials and Vacuum Options
steel base (-ST)
increased lifte time (-Z)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)
Step FileTechnical Drawing