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SHL-1D20N10

SHL-20N-10 High Load Vertical Positioner

SHL-1D20N-10

resolution: ‹ 1 nm
normal load: 20 N (2 kg)
vacuum: down to 10-11 mbar
travel range: 10 mm
non magnetic: available
size: 65 x 75 x 50 mm3

High Load Vertical Positioner

This high load vertical positioner features a travel range of 11 mm and comes in the dimensions of 65 x 75 x 50 mm³. It can take a normal load of 20 N (2 kg).

Mechanical Properties
max. normal force FN

20 N

max. lift force FL

20 N

positioner dimension

65 x 75 x 50 mm3

weight

400 g

Positioning
travel

± 5 (10) mm

step width

10 – 300 nm

scan range

> 500 µm

scan resolution

< 1 nm

velocity

> 5 mm/s

max. frequency

10 kHz

Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 100 nm 1

Closed-Loop with -L
sensor resolution

4 nm

closed loop resolution

500 nm (H)CU
4 nm MCS

repeatability

± 1 µm (H)CU
± 200 nm MCS

Materials and Vacuum Options 2
steel base (-ST), titanium base (-TI)
black anodized (-BK)
-M sensor on demand (-M)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 measured over the complete travel range, for shorter travel much better
2 positioner dimensions, mounting holes and travel range may vary and can be customized

Step FileTechnical Drawing