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SHL-3D5N-10

SHL-3D5N-10 High Load Vertical Positioner

SHL-3D5N-10

resolution: ‹ 1 nm
normal load: 5 N (500 g)
vacuum: down to 10-11 mbar
travel range: 1 mm
non magnetic: available
size: 100 x 140 x 40 mm3

3 Axis High Load Vertical Positioner

This high load vertical positioner features a travel range of 1 mm and comes in the dimensions of 100 x 140 x 40 mm³. It can take a normal load of 5 N (500 g).

Mechanical Properties
max. normal force FN

5 N

max. lift force FL

5 N

positioner dimension

100 x 140 x 40 mm3

weight

650 g

Positioning
travel

± 5 (10) mm

step width

1 – 150 nm

scan range

> 500 µm

scan resolution

< 1 nm

velocity

> 5 mm/s

max. frequency

10 kHz

Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 100 nm 1

Closed-Loop with -L
sensor resolution

4 nm

closed loop resolution

500 nm (H)CU
4 nm MCS

repeatability

± 1 µm (H)CU
± 200 nm MCS

Materials and Vacuum Options 2
steel base (-ST), titanium base (-TI)
black anodized (-BK)
-M sensor on demand (-M)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 measured over the complete travel range, for shorter travel much better
2 positioner dimensions, mounting holes and travel range may vary and can be customized

Step FileTechnical Drawing