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SL-0610

SL-0610

resolution: ‹ 50 nm
normal load: 1 N (100 g)
vacuum: down to 10-11 mbar
travel range: 4.5 mm (other travel ranges upon request)
size: 11 x 11 x 5.2 mm3

Nanometer Precision Linear Positioner

The SL-0610 is a nanometer precision linear positionier with a weight of only 3 g. The positioner is capable of a normal load of 1 N and has the dimensions 11 x 11 x 5.2 mm³.

Mechanical Properties
blocking force FB

> 1.6 N

max. normal force FN

1 N

max. lift force FL

0.35 N

positioner dimension

11 x 11 x 5.2 mm3

weight

≈ 3 g

pitch torque MP

0.1 Nm

yaw torque MY

0.1 Nm

roll torque MR

0.1 Nm

Positioning
travel

± 2.25 (4.5) mm

step width

1 – 1,500 nm

resolution of motion

50 nm

velocity

> 15 mm/s

max. frequency

18.5 kHz

Materials and Vacuum Options
-HV (10-6 mbar), UHV / UHVT (10-11 mbar)
Step FileTechnical Drawing