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SLC-2490 Nanometer Precision Linear Positioner

SLC-2490

resolution: ‹ 1 nm
normal load: 30 N (3 kg)
vacuum: down to 10-11 mbar
travel range: 63 mm
non magnetic: available
size: 90 x 24 x 10.5 mm3

Nanometer Precision Linear Positioner

With the linear positioner SLC-2490 you can perform nanopositioning tasks when you have the need for large travels. Its travel range is 63 mm and its normal load is 30 N (3 kg). It comes in the dimensions of 90 x 24 x 10.5 mm³.

Mechanical Properties
blocking force FB

> 3.5 N

max. normal force FN

30 N

max. lift force FL

> 1.5 N

positioner dimension

90 x 24 x 10.5 mm3

weight

108 g

pitch torque MP

29.5 Nm

yaw torque MY

29.5 Nm

roll torque MR

4.8 Nm

Positioning
travel

± 31.5 (63) mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 90 nm 2

Closed-Loop with -L 3
sensor resolution

4 nm

closed loop resolution

50 nm (H)CU
4 nm MCS

repeatability

± 1 µm (H)CU
± 180 nm MCS

Closed-Loop with -M 3
sensor resolution

100 nm

closed loop resolution

500 nm (H)CU
100 nm MCS

repeatability

± 2.5 µm (H)CU
± 0.5 µm MCS

Materials and Vacuum Options 4
steel base (-ST), titanium base (-TI)
non magnetic materials (-NM 5)
black anodized (-BK)
integrated connecting elements (-O)
external support for increased MY, MR (-W)
high precision bearing (-P)
increased blocking force (-D, +1.5 N)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 for low-vibration mode (-LV), for scan-mode < 1 nm, otherwise 50 – 1,500 nm
2 measured over the complete travel range, for shorter travel much better
3 with mechanical end stops, 3 mm reduced travel
4 positioner dimensions, mounting holes and travel range may vary and can be customized
5 all holes M1.6, no dowel holes, screwing depth: min. 3 mm, max. 3.5 mm

Step FileTechnical Drawing