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SLL12

SLL12

resolution: ‹ 1 nm
normal load: 30 N (3 kg)
vacuum: down to 10-11 mbar
travel range: 70 .. 475 mm
size: 33.8 x 27 x 13 mm3

Nanometer Precision Linear Rail Positioner

The linear positioner SLL12 features a travel range of 70 – 475 mm and is capable of a normal load of 30 N (3 kg).

Mechanical Properties
blocking force FB

> 3 N

max. normal force FN

30 N

max. lift force FL

> 1 N

carriage dimension

33.8 x 27 x 13 mm3

weight of carriage

44 g

weight of rail

59 g / 100 mm

pitch torque MP

6 Nm

yaw torque MY

6 Nm

roll torque MR

11 Nm

Positioning
rail length

70 .. 475 mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 70 .. 450 nm 2

Closed-Loop with -M
sensor resolution

100 nm

closed loop resolution

500 nm (H)CU
100 nm MCS

repeatability

± 2.5 µm (H)CU
± 0.5 µm MCS

Materials and Vacuum Options 3
multiple carriages
counterbores, tapped holes (M4)
black anodized (-BK)
tapped holes M4 necessary for closed-loop
-HV (10-6 mbar) 3

1 for low-vibration mode (-LV), for scan-mode < 1 nm, otherwise 50 – 1,500 nm
2 measured over the complete travel range, for shorter travel much better
3 positioner dimensions, mounting holes and travel range may vary and can be customized

Step FileTechnical Drawing