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SLLV42

SLLV42

resolution: ‹ 1 nm
normal load: 30 N (3 kg)
vacuum: down to 10-11 mbar
travel range: 70 .. 1480 mm
size: 54 x 60 x 13 mm3

Nanometer Precision Linear Rail Positioner

The SLLV42 provides a solution for precise long range positioning from 70 up to 1480 mm. It is available for high vacuum. The positioner is capable of a normal load of 30 N (3 kg) and has the dimensions 54 x 60 x 13 mm³.

Mechanical Properties
blocking force FB

> 5 N

max. normal force FN

30 N

max. lift force FL

> 1.5 N

carriage dimension

54.8 x 60 x 16 mm3

weight of carriage

148 g

weight of rail

286 g / 100 mm

pitch torque MP

25 Nm

yaw torque MY

25 Nm

roll torque MR

90 Nm

Positioning
rail length

70 .. 1480 mm

step width

1 – 1,500 nm 1

scan range

> 3 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 70 .. 450 nm 2

Closed-Loop with -M
sensor resolution

100 nm

closed loop resolution

500 nm (H)CU
100 nm MCS

repeatability

± 2.5 µm (H)CU
± 0.5 µm MCS

Materials and Vacuum Options
multiple carriages
counterbores, tapped holes (M4)
-HV (10-6 mbar) 3

1 for low-vibration mode (-LV), for scan-mode < 1 nm, otherwise 50 – 1,500 nm
2 measured over the complete travel range, for shorter travel much better
3 positioner dimensions, mounting holes and travel range may vary and can be customized

Step FileTechnical Drawing