3DR Wafer Handling System
Compact handling system for x-y-z movement and 360° rotation of a 4″ wafer.
SmarAct positioners can easily be assembled into complete micro- and nanopositioning systems. These can be simple manipulators as well as complex micro- and nanorobots.
You have the possibility to use our expertise in micro- and nanopositioning and let us configure and assemble a system that best meets your requirements.
The following pages show you a small selection of positioning systems that have been developed together with and for our customers – Get inspired.
Please note, that we can stack nearly all our positioners onto each other to build manipulators and stages with two or more degrees of freedom (DOF).
The manipulator can also be ordered with the -HV or -UHV option making it high and ultra-high vacuum compatible.
The fiber holders are connected to the 3D positioners and a wave guide measurement system can be set to the 1D positioner. In combination with a constant force spring, the 3D positioners are capable to lift payloads up to 400 g.
All of the used axes are equipped with a nanosensor, enabling a resolution of 1 nm and a repeatability of positioning of about 45 nm with a maximum speed of 20 mm/s.