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Rotary Positioners

SmarAct is offering different piezo-based rotary positioners with unlimited rotation.

SmarAct is offering different piezo-based rotary positioners with unlimited rotation. Due to the piezo-motor our rotary positioners are exceptionally compact and precise. Additionally, integrated optical encoders ensure highest closed-loop positioning resolutions (below 1 µrad) and repeatability (up to 5µrad). You can choose between several standard rotary positioners, which are available with different options, e.g., non-magnetic materials and ultra-high vacuum (UHV) compatibility. Furthermore, all rotary positioners can be customized to your needs. Just send us your requirements and we will find a suitable solution.

SR-1908

SR-1908
aperture

7 mm

sensor resolution

size

24.7 x 20 x 8.5 mm3

normal load

5N (500g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

45°/s

details

SR-2013

SR-1908
aperture

sensor resolution

25 μ°

size

25.5 x 20 x 10.2 mm3

normal load

3N (300g)

vacuum

down to 10-11 mbar

non-magnetic

available

velocity

45°/s

details

SR-2812

SR-2812
aperture

9 mm

sensor resolution

25 μ°

size

37.5 x 30 x 12 mm3

normal load

3N (300g)

vacuum

down to 10-11 mbar

non-magnetic

available

velocity

25°/s

details

SR-4011

SR-4011
aperture

9 mm

sensor resolution

15 μ°

size

40 x 40 x 11 mm3

normal load

10N (1000g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

15°/s

details

SR-4513

SR-4513
aperture

8 mm

sensor resolution

15 μ°

size

45 x 45 x 13.5 mm3

normal load

20N (2000g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

15°/s

details

SR-5018

SR-5018
aperture

8 mm

sensor resolution

15 μ°

size

50 x 50 x 16.5 mm3

normal load

20N (2000g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

15°/s

details

SR-5714

SR-5714
aperture

25 mm

sensor resolution

15 μ°

size

57 x 57 x 14 mm3

normal load

25N (2500g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

9°/s

details

SR-5714C

SR-5714C
aperture

25 mm

sensor resolution

15 μ°

size

57 x 57 x 13.75 mm3

normal load

25N (2500g)

vacuum

down to 10-11 mbar

non-magnetic

available

velocity

9°/s

details

SR-7012

SR-7012
aperture

30 mm

sensor resolution

15 μ°

size

70 x 70 x 12 mm3

normal load

25N (2500g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

9°/s

details

SR-7021

SR-7021
aperture

25 mm

sensor resolution

15 μ°

size

90 x 90 x 21 mm3

normal load

25N (2500g)

vacuum

down to 10-11 mbar

non-magnetic

available

velocity

9°/s

details

SR-12012

SR-12012
aperture

82 mm

sensor resolution

5 μ°

size

120 x 120 x 12 mm3

normal load

20N (2000g)

vacuum

down to 10-6 mbar

non-magnetic

velocity

10°/s

details

Application Example

3DR Wafer Handling System

3DR Wafer Handling System

Compact handling system for x-y-z movement and 360° rotation of a 4″ wafer.