SmarAct is offering different piezo-based rotary positioners with unlimited rotation. Due to the piezo-motor our rotary positioners are exceptionally compact and precise. Additionally, integrated optical encoders ensure highest closed-loop positioning resolutions (below 1 µrad) and repeatability (up to 5µrad). You can choose between several standard rotary positioners, which are available with different options, e.g., non-magnetic materials and ultra-high vacuum (UHV) compatibility. Furthermore, all rotary positioners can be customized to your needs. Just send us your requirements and we will find a suitable solution.
3DR Wafer Handling System
Compact handling system for x-y-z movement and 360° rotation of a 4″ wafer.