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SmarPod – Hexapod

SmarPod 70.42

Parallel-Kinematics for Precise Applications

Based on our linear positioners, we have developed parallel-kinematic systems for manipulating objects in all six degrees of freedom (three linear axes and three rotary axes), called „SmarPod“. The hexapod-like SmarPod is considerably more compact than common serial kinematics. It has many advantages such as higher rigidity, low moving mass hence improved dynamical response and a user-definable virtual pivot point.

Due to the modular design of the SmarPod, its size and strength can be adapted to changing requirements, reaching from a few centimeters to almost a meter of travel with nanometer resolution.

70.42

Smarpod 70.42
x

10 mm

y

10 mm

z

5 mm

Θx

14 °

Θy

16 °

Θz

21 °

details

115.25

SmarPod 115.25
x

11 mm

y

11 mm

z

5 mm

Θx

18 °

Θy

20 °

Θz

37 °

details

110.45

SmarPod 110.45
x

20 mm

y

20 mm

z

11 mm

Θx

21 °

Θy

24 °

Θz

38 °

details

225.75

SmarPod 225.75
x

41 mm

y

41 mm

z

21 mm

Θx

20 °

Θy

23 °

Θz

41 °

details

P-SLC-17

SmarPod P-SLC-17
x

48 mm

y

28 .. 48 mm

z

≤ 9 mm

Θx

≤ 28 °

Θy

≤ 26 °

Θz

≤ 20 °

details

P-SLC-24

SmarPod P-SLC-24
x

79 .. 119 mm

y

45 .. 119 mm

z

≤ 12 mm

Θx

≤ 31 °

Θy

≤ 27 °

Θz

≤ 42 °

details

P-SLL

SmarPod P-SLL
x

20 .. 1200 mm

y

45 .. 119 mm

z

≤ 16 mm

Θx

≤ 42 °

Θy

≤ 33 °

Θz

≤ 42 °

details

Wafer 200

SmarPod Wafer 200
x

200 mm

y

200 mm

z

10 mm

Θx

6 °

Θy

7 °

Θz

24 °

details

Key Features

Six Degrees of Freedom

The SmarPod is a parallel kinematics nanomanipulator. The stage is actuated by the simultaneous movement of multiple linear positioners, in contrast to a stacked (serial) design. The parallel arrangement of the positioners optimizes the overall system stiffness and allows to control all six degrees of freedom (X, Y, Z, roll, pitch and yaw).

Control in Cartesian Coordinates

SmarPod Control in Cartesian Coordinates

Motion commands are expressed in Cartesian coordinates, and all transformations are encapsulated in the control libraries which gives you the possibility to issue commands from your own software, our graphical user interface or a SmarPod hand controller.

User Definable Pivot Point

With the possibility to set the pivot point freely, it is easy to rotate around any point in space.

Many Options Available

  • High & ultra-high vacuum compatibility
  • Non-magnetic materials
  • UV resilient materials
  • Distance-coded reference marks for short referencing ways

High resolution and repeatability

A backlash-free mechanical design makes it possible to achieve a movement performance which is in the same order of magnitude as for our single positioners. The smallest movement increment is 1 nm linear and 1 µrad for rotary motion. Over the whole travel the bidirectional repeatability is 200 nm in X, Y and Z and 10 µrad in roll, pitch and yaw. For smaller movements the repeatability is in the order of several nanometers as shown in the graphs below.

Linear Repeatability

SmarPod Linear Repeatability
  • Interferometer test
  • 10 steps – back and forth
  • Step width: 10 nm
  • One step every 200 ms
  • Graph shows an excellent linear repeatability

Angular Repeatability

  • Interferometer test
  • 10 steps – back and forth
  • Step width: 1 µrad
  • One step every 500 ms
  • Graph shows an excellent linear repeatability
SmarPod Angular Repeatability

Linear Repeatability for 1 mm travel

SmarPod Linear Repeatability 1 mm
  • Interferometer test
  • Travel range: 1 mm
  • Data range: -30 .. 50 nm
  • Standard deviation: 15 nm

SmarPod Naming

SmarPod Naming
The following examples show the dependencies between SmarPod naming and footprint for our standard circular SmarPods as well as the connection between name and movement range for our parallel SmarPods.

Standard circular SmarPods:

SmarPod Diameter.Height

Example:

  • SmarPod 110.45 – diameter 110 mm, height 45 mm

Parallel SmarPods:

SmarPod P-Positioner-Series X Axis Length.Y Axis Length

Examples:

  • SmarPod P-SLC-17 80.50
    • x axis SLC-1780, y axis SLC‑1750 (as shown below)
  • SmarPod P-SLC-24 180.75
    • x axis SLC-24180, y axis SLC‑2475
  • SmarPod P-SLL 500.75
    • x axis SLL42-500, y axis SLC-2475