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SmarPod 110.45

SmarPod 110.45

SmarPod 110.45

Parallel-Kinematics for Precise Applications.

resolution: ‹ 1 nm
normal load: 5 N (500g)
vacuum: down to 10-11 mbar
non magnetic: available
size: Ø 110 mm x 45 mm

Parallel-Kinematics for Precise Applications

With an optional nanosensor (-S) the hexapod-like SmarPod 110.45 is designed with 6 DoF. Its dimensions are Ø 110 mm x 45 mm. This SmarPod ist able to take a normal load of 5 N (500 g).

Mechanical Properties
max. vertical load FV

5 N

max. horizontal force FH

2.5 N

positioner dimension

Ø 110 x 45 mm3

weight

≈ 400 g

Travel Ranges
x

20 mm

y

20 mm

z

11 mm


Θx

21 °

Θy

24 °

Θz

38 °

Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1x,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm

Materials and Vacuum Options 2
distance coded nanosensor (-SC)
non magnetic materials (-NM)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 bidirectional for full travel range, unidirectional for 1 mm travel range
2 positioner dimensions, mounting holes and travel range may vary

Application Example

Microassembly

Microassembly system for automatic assembly of FAC lens arrays to a diode laser stack.

Step FileTechnical Drawing