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SmarPod 115.25

SmarPod 115.25

SmarPod 115.25

with attached manipulator and tip holder.

resolution: ‹ 1 nm
normal load: 2.5 N (250g)
vacuum: down to 10-11 mbar
non magnetic: available
size: 115 x 101.4 x 25 mm3

Parallel-Kinematics for Precise Applications

Like all our hexapod-like SmarPods, the SmarPod 115.25 is fully customizable. This SmarPod has the dimensions of 115 x 101.4 x 25 mm³ and a normal load of 5 N (500 g).

Mechanical Properties
max. vertical load FV

2.5 N

max. horizontal force FH

1.25 N

positioner dimension

115 x 101.4 x 25 mm3

weight

≈ 400 g

Travel Ranges
x

11 mm

y

11 mm

z

5 mm


Θx

18 °

Θy

20 °

Θz

37 °

Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1x,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm

Materials and Vacuum Options 2
distance coded nanosensor (-SC)
non magnetic materials (-NM)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 bidirectional for full travel range, unidirectional for 1 mm travel range
2 positioner dimensions, mounting holes and travel range may vary

Step FileTechnical Drawing