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SmarPod P-SLL

SmarPod P-SLL

SmarPod P-SLL

resolution: ‹ 1 nm
normal load: 10 N (1000 g)
vacuum: down to 10-11 mbar
non magnetic: available
size: 250 x 80 x 67 mm3

Parallel-Kinematics for Precise Applications

The hexapod-like SmarPod P-SLL main feature is the long travel ranges: from 20 to 1200 mm (X) Θx: 40 °, from 29 to 69 mm (Y), Θy: 30 ° and 13 mm (Z), Θz: 40 °. It takes a normal load of 10 N (1000 g).

Mechanical Properties 1
max. vertical load FV

10 N

max. horizontal force FH

5 N

positioner dimension

> 250 x 80 x 67 mm3

weight

≈ 300 .. 2000 g

Travel Ranges
x

20 .. 1200 mm

y

45 .. 119 mm

z

≤ 16 mm


Θx

≤ 42 °

Θy

≤ 33 °

Θz

≤ 42 °

Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 2 (x,y,z)

± 200 nm

repeatability for full travel range 2x,y,z)

± 10 µrad

repeatability for 1 mm travel range 2 (x,y,z)

± 15 nm

Materials and Vacuum Options 3
distance coded nanosensor (-SC)
non magnetic materials (-NM)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 positioner dimensions, weight and travel strongly depending on SmarPod configuration
2 bidirectional for full travel range, unidirectional for 1 mm travel range
3 positioner dimensions, mounting holes and travel range may vary

Step FileTechnical Drawing