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SmarPod Wafer 200

SmarPod Wafer 200

SmarPod Wafer 200

resolution: ‹ 1 nm
normal load: 20 N (2 kg)
vacuum: down to 10-11 mbar
size: 420 x 430 x 93 mm3

Parallel-Kinematics for Precise Applications

SmarAct’s hexapod-like SmarPod Wafer 200 combines SLL- and SLC-positioners for achieving long travel ranges and precise positioning. It provides the perfect solution for all standard wafer.

Mechanical Properties
max. vertical load FV

20 N

positioner dimension

420 x 430 x 93 mm3

weight

≈ 11 kg

Travel Ranges
x

200 mm

y

200 mm

z

10 mm


Θx

6 °

Θy

7 °

Θz

24 °

Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1x,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm

Materials and Vacuum Options 2
distance coded nanosensor (-SC)
-HV (10-6 mbar)

1 bidirectional for full travel range, unidirectional for 1 mm travel range
2 positioner dimensions, mounting holes and travel range may vary

Step FileTechnical Drawing