Closed-Loop Positioning Using the PICOSCALE Interferometer and an MCS2
The combination of PICOSCALE Interferometer, MCS2 and stage from SmarAct allows to control the position of an object at a specific point of interest with maximum accuracy.
The combination of PICOSCALE Interferometer, MCS2 and stage from SmarAct allows to control the position of an object at a specific point of interest with maximum accuracy.