Closed-Loop Positioning Using the PICOSCALE Interferometer and an MCS2

The combination of PICOSCALE Interferometer, MCS2 and stage from SmarAct allows to control the position of an object at a specific point of interest with maximum accuracy.

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Interferometer

PICOSCALE Interferometer for contactless high precision displacement measurements.

Control Systems and Software

Sophisticated and easy-to-use control systems paired with intuitive software solutions and development kits
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SmarAct Metrology

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