Electrical Probing

Electrical probing is crucial in several semiconductor applications to test electric properties of devices. We provide automated probing solutions for different levels of structure sizes in various environments – from coarse probing in atmospheric conditions under a light microscope to fully automated probing of down to 3nm technology nodes inside a scanning electron microscope.
Dedicated products like the SMARPROBE nanoprober, provided by SmarAct Metrology, offer the full comfort of a fully integrated solution. On the other hand, any of our probing technology can be implemented in smaller stand-alone positioning systems, with the possibility to be combined with other technologies like optical probing or vibrometry.

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