Electrical Probing

Electrical Probing

Electrical probing is crucial in several semiconductor applications to test electric properties of devices. We provide automated probing solutions for different levels of structure sizes in various environments – from coarse probing in atmospheric conditions under a light microscope to fully automated probing of down to 3nm technology nodes inside a scanning electron microscope.
Dedicated products like the SMARPROBE nanoprober, provided by SmarAct Metrology, offer the full comfort of a fully integrated solution. On the other hand, any of our probing technology can be implemented in smaller stand-alone positioning systems, with the possibility to be combined with other technologies like optical probing or vibrometry.