High Resolution Optical Displacement Measurements of a Piezo Scanner
In this application note, the steps of a piezo scanner are verified. In closed-loop operation using an optical encoder as sensor, a PICOSCALE Interferometer is employed to reveal single-nanometer steps.
Related Products
PICOSCALE Interferometer Controller
The PICOSCALE Interferometer Controller is equipped with a laser source and the necessary electronics for processing and analyzing optical signals.
PICOSCALE Interferometer
All PICOSCALE products are based on a Michelson interferometer, a precise method to measure displacements and vibrations. The Michelson interferometer
