High Resolution Optical Displacement Measurements of a Piezo Scanner

In this application note, the steps of a piezo scanner are verified. In closed-loop operation using an optical encoder as sensor, a PICOSCALE Interferometer is employed to reveal single-nanometer steps.

Download application note


PICOSCALE Interferometer for contactless high precision displacement measurements.

About the author

SmarAct Metrology

More posts by SmarAct Metrology