Wafer Positioning

Wafer positioning is an essential step in the manufacturing of semiconductors and photonics, allowing for accurate placement of components such as integrated circuits and PICs. Precise alignment leads to improved device performance and functionality, resulting in high-quality products for customers.  
The electromagnetic TRIPOD is a solution that offers high-precision positioning and alignment of wafers in six degrees of freedom with maximum accuracy and flexibility. The system is designed to handle heavy loads up to 6kg at high velocities (translational: 200mm/s; rotational: 15°/s), allowing for dynamic and versatile performance.  
In addition, SmarSHIFT electromagnetic direct drive stages are durable and virtually maintenance-free. Overall, they enable the precise positioning and alignment of wafers during fabrication steps, ensuring high-quality and reliable semiconductor devices.

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SmarAct Motion

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