The SHL-3D5N-5 is a lift stage based on a parallel kinematic design. It is designed to be able to lift 500g of weight regardless of the orientation of the stage with respect to gravity. This, in combination with position sensors for direct position feedback and closed-loop-operation, makes it ideally suited as a nanometer precision end station for a robotic arm or similar applications.
SHL-3D5N-5 - High Load Stage
Specifications
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 3 |
Travel [mm] | 5 |
Max. Lift Force [N] | 5 (in all directions) |
Dimensions [mm] | 100 x 140 x 40 |
Weight [g] | 650 |
Open-loop | |
Open-loop | |
Velocity [mm/s] | > 5 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
Sensor Resolution (H)CU [nm] | 100 (L) |
Uni-Directional Repeatability (H)CU [nm] | ± 200 (S,L) |
Options | |
Options | |
Material Options | Aluminum as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
Accessories
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