Nano-precision electrical probing with SmarAct's SMARPROBE

Exceptional performance

  • Fully encoded with 1 nm resolution
  • Active position holding
  • Large scan-range and low thermal drift
  • Large area probing on full 25 x 25 mm
  • High-speed EBAC/EBIC imaging

 

Efficient and easy

  • All-in-one user interface
  • Automatic landing and alignment of all probes
  • “Point & Click” navigation within the SEM image
  • Group movements and “Step & Repeat”
  • CAD navigation for sample and probes

Product Presentation

Application Examples

For an overview of all application notes click here.

Nanoprobing

The SMARPROBE system can be used to probe even the smallest technology nodes due to the high precision of the SmarAct drives and the active temperature control which enables low thermal drift of the probes.

The closed-loop positioning allows the user to position the tips to the point-of-interest in very short time and with as little electron beam exposure as possible. The safe-approach movement and the large scan range will reduce the risk of damage to the tips and the sample during fine-positioning. The resulting longevity of the tips combined with the ability to load several samples give you the possibility to greatly improve the sample through-put.

 

Electron Beam Absorbed Current (EBAC)

The SMARPROBE system can be upgraded with a current amplifier implemented directly into the probe holder. It is possible to switch between nanoprobing and current amplification with just one click. The short local distance between probe and amplifier guarantees lowest measurement noise and high measurement bandwidths. The current amplification is typically used for failure analysis techniques such as Electron Beam Absorbed Current (EBAC) or Resistive Contrast Imaging (RCI), to locate disconnects or shorts within metal lines or VIAs. An example of analyzing the metal line network using EBAC is shown in the image.

 

Key Specifications

SmarActs's Nanoprober is available in various configurations and with multiple options and customization levels. The table below provides an impression of the key specifications. For each product of the SMARPROBE family, a detailed specification sheet is available at the download section.

SMARPROBE Nanoprober
 
Manipulator with Probe Mount XYZ closed-loop
Number of Manipulators ≤ 8
Sample Stage XYZ closed-loop
Probing Area [mm] 25 x 25
Scan-Range in XYZ1 [µm] > 10
Thermal Drift2 [nm/min] < 1
Cleaning Plasma Cleaning Compatible
Probe Mount3 Standard 0.25 or 0.5 mm diameter Tungsten probes
Electrical Connection4 Coax

1 Distance that can be travelled without stick-slip events of the positioner occurring, operating the prober within its Scan-Range helps to minimize vibrations. The listed scan-range is available with the optional X-Extension

2 With the optional L-Extension

3 Optionally with integrated Probe-Sensor to detect contact with the sample

4 Also available with Triax connection