SmarAct’s hybrid drives combine the advantages of stick-slip drives and piezo scanners in a single, compact device. The hybrid drives consist of two drive units – the stick-slip unit, which drives the center part of the stage and thus the entire cover plate, and the scanner unit, which drives the outer frame part of the cover plate relative to the center part. Both the stick-slip drive and the scanner can use the same feedback signal for closed-loop positioning.
