In the field of micro- and nanotechnology, the impact of vibrations is often to be minimized to maintain precision and to avoid mechanical fatigue. A contrario, devices like sensors and loudspeakers rely on vibrations for their function. Here, it is important to have a well-defined response in the desired frequency range.

Laser interferometry and vibrometry are widely accepted methods for contactless modal analysis of microelectromechanical devices, in which SmarAct Metrology’s PICOSCALE Interferometers and Vibrometers excel.

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PICOSCALE Vibrometer for the modal analysis of small samples.

Application Examples