Advanced Probe Holder

The APH is controlled by the SMARPROBE touch controller. Together they open up new possibilities.

Nanoprobing becomes easier and faster as your probes can land automatically even before you have turned on the electron beam. Automatic probe landing combined with closed-loop motion control and Python scripting enables unique solutions for automating your nanoprobing tasks.

In addition, the low-noise integrated current amplifier allows you to perform fast EBAC imaging even at low electron beam currents (a few pAs), protecting your sample and your time.

Features:

  • Automatic probe landing of up to eight probes simultaneously
  • Low-noise EBAC/EBIC imaging
  • Fully software controlled
  • Supports Voltage Biasing
  • Supports lock-in EBIC
  • Live mixing with SEM image
  • EBIRCh available
Any questions?
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SmarAct Metrology

Technical Sales