Sensor Type	S	SC	L	LC	I
Working Principle	Optical	Optical	Optical	Optical	Inductive
Resolution [nm]	1	1	4	4	300
Reference Positions	Single reference mark	Multiple reference marks	Single reference mark	Multiple reference marks	Endstop
Control System Compatibility	MCS2, SDC2	MCS2	MCS2, SDC2, CU	MCS2, CU	EMS, CU
Vacuum Compatibility	Down to 1E-11 mbar	Down to 1E-11 mbar	Atmospheric pressure only	Atmospheric pressure only	Down to 1E-6 mbar

Optical and inductive sensors can be integrated into our stages for closed-loop position control, allowing you to define the desired travel distance or the target position and the velocity of the stage.