Vacuum Compatibility
Standard stages are configured to work in atmospheric pressure. For high vacuum (HV, 1E-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar) applications, specialized versions are available. As SmarAct is a complete solution provider, we deliver complete vacuum compatible single stages or multi-axis systems including vacuum compatible cabling and HV or UHV electrical feedthroughs. Please have a look at the ultra-high vacuum piezo stages section of our environment-specific stages subpage.