This high load stage is suitable for high availability applications in science and industry. It is equipped with SmarActs Exchangeable Drive-Unit, which allows the complete piezo-drive to be removed from the stage when required for servicing. As the Drive-Unit is accessible from the side of the stage the device does not need to be removed from the positioning setup during servicing. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation.
CHS-5237-1D10N-10 - High Load Stage
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 10 |
| Max. Lift Force [N] | 10 |
| Dimensions [mm] | 52 x 52 x 37 |
| Weight [g] | 270 |
| Open-loop | |
| Open-loop | |
| Velocity [mm/s] | > 4 |
| Resolution [nm] | < 1 |
| Closed-Loop | |
| Closed-Loop | |
| Closed-Loop Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Closed-Loop Repeatability, Full Stroke MCS2 [nm] | 100 (S), 200 (L) |
| Closed-Loop Resolution (H)CU [nm] | 500 (L) |
| Closed-Loop Repeatability, Full Stroke (H)CU [nm] | ±1000 (L) |
| Options | |
| Options | |
| Material Options | Aluminum base as standard; steel base (-ST); titanium base (-TI); black anodized (-BK) |
| Vacuum Options | HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) |
Accessories
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