CHS-9257-1D-15 - High Load Stage

This long travel high load stage is equipped with SmarAct's exchangeable drive unit, which allows the complete piezo drive to be removed from the stage when required for servicing. Since the drive unit is accessible from the stage's side, the device does not need to be removed from the positioning setup during servicing. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages' motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed-loop operation. The mountinghole pattern supports an easy screwing to the linear stages of the CLS92-Series. Optionally, the maximum lift force can be increased upon request.

  • Technical-Drawing_CHS-9257-1D
    Jul 29, 2021
  • Step-file-CHS-9257-1D
    Jul 29, 2021
  • Technical-Drawing_CHS-9257-1D_with_CFS
    Jul 29, 2021
  • Step-file-CHS-9257-1D_with_CFS
    Jul 29, 2021

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 20
Max. Lift Force [N] 15
Dimensions [mm] 92 x 92 x 57
Weight [g] 935
  Open-loop
Open-loop
Velocity [mm/s] > 2
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S), 4 (L)
Uni-Directional Repeatability MCS2 [nm] 500 (S, L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability (H)CU [nm] ± 200 (L)
  Options
Options
Material Options Aluminum base as standard; steel base (-ST); titanium base (-TI); black anodized (-BK)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)

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