DLS-5252 - Hybrid-Drive

Hybrid drive stages combine the advantages of long travel range stick-slip stages and high resolution piezo scanners.

Like all of SmarAct’s hybrid drive stages, the DLS-5252 combines the advantages of long travel stickslip stages with high resolution piezo scanners. The DLS-5252 is compatible with the SmarAct modular system, which means that the stage can easily be mounted to the CLS-52 stages, equivalent rotation stages and all adapter plates and connecting elements. The stage requires only one channel of the MCS2 although it consists of two different drive units.

  • Technical_Drawing-DLS5252-S
    Dec 10, 2020
  • Step-file_DLS5252-S
    Dec 10, 2020

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 30
Scan Range [µm] > 35
Blocking Force [N] > 3.5
Max. Normal Force [N] 5.0
Max. Lift Force [N] > 1.5
Weight [g] 130
Dimensions [mm] 52 x 52 x 15 (L x W x H)
Resonance Frequency (no load) [Hz] > 350
  Material
Material
Base Material Titanium/ Aluminum base (-AL)
  Closed-Loop
Closed-Loop
Velocity [mm/s] up to 20
Closed-Loop Resolution MCS2 [nm] 1 (S)
Scan Cut-off Frequency [Hz] > 10
  Options
Options
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes

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