Like all of SmarAct’s hybrid drive stages, the DLS-5252 combines the advantages of long travel stickslip stages with high resolution piezo scanners. The DLS-5252 is compatible with the SmarAct modular system, which means that the stage can easily be mounted to the CLS-52 stages, equivalent rotation stages and all adapter plates and connecting elements. The stage requires only one channel of the MCS2 although it consists of two different drive units.
DLS-5252 - Hybrid-Drive
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 30 |
| Scan Range [µm] | > 35 |
| Blocking Force [N] | > 3.5 |
| Max. Normal Force [N] | 5.0 |
| Max. Lift Force [N] | > 1.5 |
| Weight [g] | 130 |
| Dimensions [mm] | 52 x 52 x 15 (L x W x H) |
| Resonance Frequency (no load) [Hz] | > 350 |
| Material | |
| Material | |
| Base Material | Titanium/ Aluminum base (-AL) |
| Closed-Loop | |
| Closed-Loop | |
| Velocity [mm/s] | up to 20 |
| Closed-Loop Resolution MCS2 [nm] | 1 (S) |
| Scan Cut-off Frequency [Hz] | > 10 |
| Options | |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes |
Accessories
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