DLS-5252

Hybrid-Drive Stages combine the advantages of long travel range Stick-Slip Stages and high resolution Piezo Scanners

The Hybrid-Drive stage DLS-5252 is fully compatible to the SLS-52 Modular System including SLS linear, rotation and goniomter stages as well as all connection elements and adapter plates. Although DLS stages inherit two drive concepts they only acquire one channel of the MCS2. In that way, you can easily extend the functionality of your existing positioning systems by adding stages with SmarAct’s new Hybrid-Drive Technology.

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 30
Scan Range [µm] > 35
Blocking Force [N] > 3.5
Max. Normal Force [N] 5.0
Max. Lift Force [N] > 1.5
Weight [g] 150
Dimensions [mm] 52 x 52 x 15 (L x W x H)
Resonance Frequency (no load) [Hz] > 350
  Material
Material
Base Material Titanium
  Closed-Loop
Closed-Loop
Velocity [mm/s] up to 20
Closed-Loop Resolution MCS2 [nm] 1 (S)
Scan Cut-off Frequency [Hz] > 10
  Options
Options
Material Options Aluminum base (-AL)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes
  • Technical_Drawing-DLS-5252
    Jun 26, 2019
  • Step-file_DLS-5252
    Jun 26, 2019

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