CLS-5282 - Linear Stage with EDU

The larger one of the CLS-52 linear stages offers a footprint of 52 x 82 mm, a travel range of 51 mm and an aperture of 9 mm in diameter. Furthermore it is able to handle payloads of up to 20 N.

Linear stages of the CLS series have been specifically designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive Units which guarantees an easy access to the stages core component, the piezo drive which makes servicing a simple task. The drive unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 51
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 20
Max. Lift Force [N] > 1.0
Dimensions [mm] 52 x 82 x 14
Weight [g] 157
Velocity [mm/s] > 20
Resolution [nm] < 1
Closed-Loop Resolution MCS2 [nm] 1 (S), 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm] ±50, ±100
Closed-Loop Resolution (H)CU [nm] 50 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm] ± 1000 (L)
Material Options Aluminum base as standard; Titanium base (-TI)
Vacuum Options HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
  • Technical-drawing_CLS5282
    Mar 02, 2020
  • Step-file_CLS5282
    Nov 13, 2019


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