CLS-9292 - Linear Stage with EDU

The smaller one of the CLS-92 linear stages offer a square footprint of 92 x 92 mm² and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N.

Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

From a performance point of view the CLS-9292 stages are on par with their SLS-9292 counterparts.

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 63
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 20
Dimensions [mm] 92 x 92 x 17
Weight [g] 357
  Open-loop
Open-loop
Velocity [mm/s] > 20
Resolution [nm] < 1
  Closed-Loop
Closed-Loop
Closed-Loop Resolution MCS2 [nm] 1 (S), 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm] ±50, ±100
Closed-Loop Resolution (H)CU [nm] 4 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm] ±1000 (L)
  Options
Options
Material Options Aluminum base as standard; Titanium base (-TI)
Vacuum Options HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
  • Step-file_CLS9292
    Nov 13, 2019
  • Technical-drawing_CLS9292
    Nov 13, 2019

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