CLS-9292 - Linear Stage with EDU

The smaller one of the CLS-92 linear stages offers a footprint of 92 x 92 mm and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N.

Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

Download Spec Sheet

Download Spec Sheet	Mechanical
Mechanical
Travel [mm]	63
Blocking Force [N]	≥ 3.5
Max. Normal Force [N]	20
Dimensions [mm]	92 x 92 x 17
Weight [g]	357
	Open-loop
Open-loop
Velocity [mm/s]	> 20
Resolution [nm]	< 1
	Closed-Loop
Closed-Loop
Closed-Loop Resolution MCS2 [nm]	1 (S), 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm]	±50, ±100
Closed-Loop Resolution (H)CU [nm]	50 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm]	±1000 (L)
	Options
Options
Material Options	Aluminum base as standard; Titanium base (-TI)
Vacuum Options	HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)