Linear stages of the CLS series were consistently designed for high availability applications in science and industry. They are equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. The drive unit can be exchanged without removing the complete device from the surrounding positioning setup. Additionally, their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers.
CLS-9292 - Linear Stage with EDU
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 63 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 20 |
| Dimensions [mm] | 92 x 92 x 17 |
| Weight [g] | 357 |
| Open-loop | |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Resolution [nm] | < 1 |
| Closed-Loop | |
| Closed-Loop | |
| Closed-Loop Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Closed-Loop Repeatability, Full Stroke MCS2 [nm] | ±50, ±100 |
| Closed-Loop Resolution (H)CU [nm] | 50 (L) |
| Closed-Loop Repeatability, Full Stroke (H)CU [nm] | ±1000 (L) |
| Options | |
| Options | |
| Material Options | Aluminum base as standard; Titanium base (-TI) |
| Vacuum Options | HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) |
Accessories
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