Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.
CLS-9292 - Linear Stage with EDU
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Travel [mm] | 63 |
Blocking Force [N] | ≥ 3.5 |
Max. Normal Force [N] | 20 |
Dimensions [mm] | 92 x 92 x 17 |
Weight [g] | 357 |
Open-loop | |
Open-loop | |
Velocity [mm/s] | > 20 |
Resolution [nm] | < 1 |
Closed-Loop | |
Closed-Loop | |
Closed-Loop Resolution MCS2 [nm] | 1 (S), 4 (L) |
Closed-Loop Repeatability, Full Stroke MCS2 [nm] | ±50, ±100 |
Closed-Loop Resolution (H)CU [nm] | 50 (L) |
Closed-Loop Repeatability, Full Stroke (H)CU [nm] | ±1000 (L) |
Options | |
Options | |
Material Options | Aluminum base as standard; Titanium base (-TI) |
Vacuum Options | HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) |
Accessories

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