PLF3232-x.60

SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.

The PLF3232-x.60 offers a scan range of 60 μm in the X direction. At 30 g, it is very light and also quite compact at 32 x 32 x 12 mm.

  • PLF3232-x.60
    Nov 02, 2022
  • Technical-Drawing_PLF3232-x.60
    Nov 04, 2022

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Scantilt [µrad] ± 3.5
Stiffness [N/μm] 0,5
Scan Range [µm] > 60
Max. Normal Force [N] 5.0
Dimensions [mm] 32 x 32 x 12
Weight [g] 30
  Material
Material
Base Material Titanium(-TI) / Aluminum base (-Al)
  Open-loop
Open-loop
Open-Loop Resolution MCS2 [nm] MCS2: <1
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] MCS2: <1 (S)
  Options
Options
Vacuum Options HV (10⁻⁶ mbar)
Non-Magnetic Option Yes (- NM)

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