SLC-2490 - Linear Piezo Stage

With dimensions of 90 x 24 x 10.5 mm, the SLC-2490 offers a travel range of 63 mm and a normal force of 30 N.

Please note that the downloadable documents for this linear piezo stage show the dimensions and specifications of an SLC-2490 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV compatible stages, stages with higher blocking force or other sensor options, please feel free to contact us at any time.

  • EX-0003415-002-product series SLC-2490
    Dec 03, 2019
  • EX-0003415-002-product series SLC-2490_with_U-shaped-base
    Dec 03, 2019
  • Step-file_SLC-2490
    Dec 03, 2019
  • Step-file_SLC-2490_with_U-shaped-base
    Dec 03, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Scan Range [µm] > 1.3
Travel [mm] 63
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 30
Max. Lift Force [N] 1.5
Dimensions [mm] 90 x 24 x 10.5
Weight [g] 108
  Open-loop
Open-loop
Velocity [mm/s] > 20
Open-Loop Resolution MCS2 [nm] < 1
Open-Loop Resolution (H)CU [nm] < 50
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S), 4 (L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Uni-Directional Repeatability (H)CU [nm] ± 200 (L)
  Options
Options
Material Options Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Mechanical Options U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z)
Performance Options Higher blocking force (-D): +1.5 N
Cryogenic Option Yes
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes. Changes of the slide hole pattern apply: all threaded holes

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