The CLL42 is equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. It is also available in a high vacuum version. The standard versions offer travels of 99, 179, 259, 379, 499 and 619 mm. Special lengths are of course available on request.
CLL42 - Large Travel Piezo Stage
Specifications
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Travel [mm] | 99 … 619 |
Rail Length [mm] | 160 ... 680 |
Blocking Force [N] | ≥ 5 |
Max. Normal Force [N] | 30 |
Max. Lift Force [N] | 1.5 |
Dimensions [mm] | 60 x 16 (open-loop carriage) |
Weight [g] | Length-dependent |
Open-loop | |
Open-loop | |
Velocity [mm/s] | > 10 |
Open-Loop Resolution MCS2 [nm] | < 1 |
Open-Loop Resolution (H)CU [nm] | 50 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
Uni-Directional Repeatability MCS2 [nm] | ± 100 (S) |
Options | |
Options | |
Material Options | Multiple carriages; Counterbores; Tapped holes (M4) |
Mechanical Options | Multiple carriages; Counterbores; Tapped holes (M4) |
Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
Accessories
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