SOM-MS-1.0

A Microscopy Stage with Long Travel Range and Nanometer Resolution

SmarAct's microscopy stages are extremely precise and reliable. They allow the specimen to be positioned in two dimensions but also allow mounting of micromanipulation systems for in situ sample manipulation. The microscopy stages are based on SmarAct's linear stages and allow long travel ranges paired nanometer precision and highest repeatability in closed-loop control.

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Download PDF Mechanical
Mechanical
Travel [mm] 103 (X), 83 (Y)
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 30
Dimensions [mm] 238 x 218 x 27
  Open-loop
Open-loop
Velocity [mm/s] >20
Open-Loop Resolution [nm] <1
  Closed-Loop
Closed-Loop
Closed-Loop Resolution MCS2 [nm] 1 (S), 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm] +- 150 (S), +-300 (L)
Closed-Loop Resolution (H)CU [nm] 50 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm] +-1000 (L)
  Options
Options
Material Options Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum Options HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)

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