(Optical Sensor for Precise Positioning Metrology)

Within the funding program EFRE of the European Union for innovation promotion, SmarAct develops a new sensor for position measurements of movable stages with nanometer precision. The sensor will be suited for various environments, such as ultra high vacuum (UHV) and manufacturing environments. The benefits of the new concept are
  • compact size
  • low power consumption
  • high bandwidth
  • high precision