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SmarPod P-SLC-17

SmarPod P-SLC-17

SmarPod P-SLC-17

resolution: ‹ 1 nm
normal load: 5 N (500 g)
vacuum: down to 10-11 mbar
non magnetic: available
size: 110 x 80 x 67 mm3

Parallel-Kinematics for Precise Applications

Equipped with SmarAct’s SLC-17 linear positioners this hexapod-like SmarPod takes a normal load of 5 N (500 g) and with dimensions of 110 x 80 x 67 mm³ it provides a very compact design.

Mechanical Properties 1
max. vertical load FV

5 N

max. horizontal force FH

2.5 N

positioner dimension

> 110 x 80 x 67 mm3

weight

≈ 200 .. 1000 g

Travel Ranges
x

48 mm

y

28 .. 48 mm

z

≤ 9 mm


Θx

≤ 28 °

Θy

≤ 26 °

Θz

≤ 20 °

Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 2 (x,y,z)

± 200 nm

repeatability for full travel range 2x,y,z)

± 10 µrad

repeatability for 1 mm travel range 2 (x,y,z)

± 15 nm

Materials and Vacuum Options 3
distance coded nanosensor (-SC)
non magnetic materials (-NM)
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)

1 positioner dimensions, weight and travel strongly depending on SmarPod configuration
2 bidirectional for full travel range, unidirectional for 1 mm travel range
3 positioner dimensions, mounting holes and travel range may vary

Step FileTechnical Drawing