SMARPOD P-CLL

The SMARPOD P-CLL utilizes three carriages of the CLL-Series to realize long travel ranges.

The SMARPOD P-CLL is based on SLC stages for the movement in the Y direction and a CLL stage in the X direction. Due to this specific combination of different linear stages, the P-CLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.

Other sizes upon request.

Values for rotational travel are given for a Pivot point at the surface of the top plate.

 

 

  • Technical-Drawing_SmarPod-C-SLL
    Mar 02, 2022
  • Step-file_SmarPod-P-SLL
    Mar 02, 2022

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 330 (X); 62 (Y); 17 (Z)
Travel [°] 33 (Θx); 33 (Θy); 36 (Θz)
Max. Normal Force [N] 10
Max. Horizontal Force [N] 5
Dimensions [mm] 554 x 105.8
Height of Platform above Ground [mm] 72
Weight [g] 2900
  Closed-Loop
Closed-Loop
Sensor Types S; SC
Smallest Increment [nm] 1
Smallest Increment [µ°] 1
Uni-Directional Repeatability MCS2 [nm] < ± 200
Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] < ± 10
Uni-Directional Repeatability MCS2 [µ°] < ± 15
  Options
Options
Vacuum Options HV (1E-6 mbar)
Non-Magnetic Option --

Accessories

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