The SMARPOD P-CLL is based on SLC stages for the movement in the Y direction and a CLL stage in the X direction. Due to this specific combination of different linear stages, the P-CLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.
Other sizes upon request.
Values for rotational travel are given for a Pivot point at the surface of the top plate.
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 330 (X); 62 (Y); 17 (Z) |
| Travel [°] | 33 (Θx); 33 (Θy); 36 (Θz) |
| Max. Normal Force [N] | 10 |
| Max. Horizontal Force [N] | 5 |
| Dimensions [mm] | 554 x 105.8 |
| Height of Platform above Ground [mm] | 72 |
| Weight [g] | 2900 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Types | S; SC |
| Smallest Increment [nm] | 1 |
| Smallest Increment [µ°] | 1 |
| Uni-Directional Repeatability MCS2 [nm] | < ± 200 |
| Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] | < ± 10 |
| Uni-Directional Repeatability MCS2 [µ°] | < ± 15 |
| Options | |
| Options | |
| Vacuum Options | HV (1E-6 mbar) |
| Non-Magnetic Option | -- |
