The SMARPOD P-CLL is based on SLC stages for the movement in the Y direction and a CLL stage in the X direction. Due to this specific combination of different linear stages, the P-CLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.
Other sizes upon request.
Values for rotational travel are given for a Pivot point at the surface of the top plate.