The SMARPOD P-SLL is based on SLC stages for the movement in the Y direction and a SLL stage in the X direction. Due to this specific combination of different linear stages, the P-SLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.
SMARPOD P-SLL
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Travel [mm] | 20 ... 1200 (X); 45 ... 119 (Y); ≤ 16 (Z) |
Travel [°] | ≤ 42 (Θx); ≤ 33 (Θy); ≤ 42 (Θz) |
Max. Normal Force [N] | 10 |
Max. Horizontal Force [N] | 5 |
Dimensions [mm] | > 250 x 93 |
Height of Platform above Ground [mm] | 67.5 |
Weight [g] | 300 ... 2000 |
Closed-Loop | |
Closed-Loop | |
Sensor Types | S; SC |
Smallest Increment [nm] | 1 |
Smallest Increment [µrad] | 1 |
Closed-Loop Repeatability [nm] | < ± 200 (Full Travel Range); < ± 15 (1mm Linear Travel) |
Closed-Loop Repeatability [µrad] | < ± 10 |
Options | |
Options | |
Vacuum Options | HV (1E-6 mbar) |
Non-Magnetic Option | -- |
Accessories

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