SMARPOD P-SLL

The SMARPOD P-SLL utilizes three carriages of the SLL-Series to realize long travel ranges.

The SMARPOD P-SLL is based on SLC stages for the movement in the Y direction and a SLL stage in the X direction. Due to this specific combination of different linear stages, the P-SLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Travel [mm] 20 ... 1200 (X); 45 ... 119 (Y); ≤ 16 (Z)
Travel [°] ≤ 42 (Θx); ≤ 33 (Θy); ≤ 42 (Θz)
Max. Normal Force [N] 10
Max. Horizontal Force [N] 5
Dimensions [mm] > 250 x 93
Height of Platform above Ground [mm] 67.5
Weight [g] 300 ... 2000
  Closed-Loop
Closed-Loop
Sensor Types S; SC
Smallest Increment [nm] 1
Smallest Increment [µrad] 1
Closed-Loop Repeatability [nm] < ± 200 (Full Travel Range); < ± 15 (1mm Linear Travel)
Closed-Loop Repeatability [µrad] < ± 10
  Options
Options
Vacuum Options HV (1E-6 mbar)
Non-Magnetic Option --
  • Technical-Drawing_SmarPod-P-SLL
    Jun 26, 2019
  • Step-file_SmarPod-P-SLL
    Jun 26, 2019

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