The SMARPOD P-SLL is based on SLC stages for the movement in the Y direction and a SLL stage in the X direction. Due to this specific combination of different linear stages, the P-SLL offers an extremely large travel range in the X direction of up to 1200 mm while maintaining a small footprint in the Y direction. It is also available as high vacuum compatible version.
SMARPOD P-SLL
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 20 ... 1200 (X); 45 ... 119 (Y); ≤ 16 (Z) |
| Travel [°] | ≤ 42 (Θx); ≤ 33 (Θy); ≤ 42 (Θz) |
| Max. Normal Force [N] | 10 |
| Max. Horizontal Force [N] | 5 |
| Dimensions [mm] | > 250 x 93 |
| Height of Platform above Ground [mm] | 67.5 |
| Weight [g] | 300 ... 2000 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Types | S; SC |
| Smallest Increment [nm] | 1 |
| Smallest Increment [µrad] | 1 |
| Closed-Loop Repeatability, Full Stroke MCS2 [nm] | < ± 200 |
| Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] | < ± 10 |
| Closed-Loop Repeatability, Full Stroke MCS2 [µrad] | < ± 15 |
| Options | |
| Options | |
| Vacuum Options | HV (1E-6 mbar) |
| Non-Magnetic Option | -- |
Accessories
Any questions?
Contact us!
Contact us!