SMARFLEX nanopositioning scanner stages use the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm. For scanning applications such as AFM, SMARFLEX scanning stages feature maximum scanning speed and minimum scanning error. Also in the field of optical microscopy, focal points can be set accuratly, mirrors can be tilted very precisely or optical fibers can be coupled.
Integrated position sensing provides closed-loop positioning with sub-nm resolution.
Because flexures are free of friction, no maintenance of wear parts is required. Furthermore, this leads to motion with very high repeatability.
Flexure stages are available in non-magnetic material versions.
Because of the small mass to driving force ratio, a highly dynamic motion can be realized.
FEM-optimized flexures precisely guide the motion and reduce motion orthogonal to the intended direction.
The motion principle is based on lever amplified piezo actuators making a continuous and vibration free motion possible.