XYZ-CLS52:52

Based on three CLS-5252 stages with a travel range of 31 mm. Equipped with a constant force spring the system is able to handle payloads of up to 3.3 N and is fully compatible with the SmarAct Modular System.

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Degrees of Freedom 3
Stages used SLS-5252
Travel [mm] 31 (X); 31 (Y); 31 (Z)
Payload [N] 1.5
  Closed-Loop
Closed-Loop
Closed-Loop Resolution MCS2 [nm] 1 (S)
  Breadboard Mount
Breadboard Mount
Dimensions [mm] 65 x 65 x 59 (L x W x H)
Center of vert. Stage above Ground [mm] 62 (46.5 … 77.5)
  Direct Mount
Direct Mount
Dimensions [mm] 79 x 63.5 x 89.5 (L x W x H)
Center of vert. Stage above Ground [mm] 56 (40.5 … 71.5)
  • Step-file_XYZ-CLS52:52
    Dec 18, 2019
  • Technical-Drawing_XYZ-CLS52:52
    Dec 18, 2019

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