XYZ-CLS52:52
Spezifikationen
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PDF-Download | Mechanical |
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Mechanical | |
Degrees of Freedom | 3 |
Stages used | CLS-5252 |
Travel [mm] | 31 (X); 31 (Y); 31 (Z) |
Payload [N] | 1.5 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 59 (L x W x H) |
Center of vert. Stage above Ground [mm] | 62 (46.5 … 77.5) |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 79 x 63.5 x 89.5 (L x W x H) |
Center of vert. Stage above Ground [mm] | 56 (40.5 … 71.5) |
Zubehör
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