CLS-92152 - Linear Stage with EDU
Linear stages of the CLS series have been specifically designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive Units which guarantees an easy access to the stages core component, the piezo drive which makes servicing a simple task. The drive unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 103 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 20 |
| Dimensions [mm] | 152 x 92 x 17 |
| Weight [g] | 591 |
| Open-loop | |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Options | |
| Material Options | Aluminum base as standard; Titanium base (-TI) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes |
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