Ultra High Vacuum Piezo Stages

Introduction

SmarAct stages are not only the perfect match for applications in ambient conditions but also for more extreme environments like high vacuum (HV, 1E-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar).

Most of the stages presented on this website are available in versions specially prepared to be able to operate in vacuum conditions.
UHV versions are bakeable at up to 150 °C and are available with two different cable types:

  • The cost efficient version utilizes Teflon insulated wires.
  • The Kapton® insulated version is a fluorine free solution.

As SmarAct is a full solution provider HV and UHV positioning systems come with suitable electrical feedthroughs. As a standard, we use:

  • HV as bulkhead LEMO® feedthroughs which are O-ring sealed.
  • UHV tight welded versions for the usage in ultra-high vacuum.

To discuss your specific requirements please do not hesitate to contact our application scientists.
For vacuum compatible stages of the SLC-17 and SLC-24 Series that will have to be baked after installation, we strongly recommend to also opt for the U-shaped base to increase the overall stiffness of the stage.

Please note that the U-shaped base resembles the same mounting hole pattern but adds 6 mm to the width of the stage itself. As a result, the width of a SLC-17 stage enlarges to 23 mm and the width of a SLC-24 stage to 30 mm respectively. Thus, waiving the U-shaped base option is only advisable if compactness is the top most requirement.

 
Atmospheric Conditions
High Vacuum (HV)
Ultra-High Vacuum (UHV)
Ultra-High Vacuum (UHVT)
Pressure -- Down to 1E-6 mbar Down to 1E-11 mbar Down to 1E-11 mbar
Wiring Teflon-insulated stranded wires with braided shield and Teflon coating Teflon-insulated stranded wires with braided shield Kapton-insulated stranded wires Teflon-insulated stranded wires with braided shield
Grease Standard grease HV compatible grease Grease-free Grease-free
Sensor Options S, L, I S, L S S
Bake-Out Temperatur -- Up to 130°C upon request Recommended 130°C (max. 150°C) Recommended 130°C (max. 150°C)
Vacuum Feedthrough -- LEMO feedthroughs
- O-ring tightened by a screw nut
- Flanges available upon request
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request