Ultra High Vacuum Piezo Stages

Introduction

SmarAct’s stages and systems are not only perfectly suited for applications under atmo-spheric conditions, but in some cases also for more extreme environments like high vacuum  (HV, 10-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar).

Most of the stages presented on this website are available in versions specially prepared for operation under vacuum conditions.
UHV versions are bakeable at up to 150 °C and are available with two different cable types:

  • The cost efficient version utilizes Teflon insulated wires.
  • The Kapton® insulated version is a fluorine free solution.

Since SmarAct is a full solution provider, HV and UHV positioning systems are supplied with matching electrical feedthroughs. As standard, SmarAct uses:

  • HV as bulkhead LEMO® feedthroughs which are O-ring sealed.
  • UHV tightly welded designs for the use in UHV.

You are very welcome to contact our application scientists at any time to discuss your specific re-quirements.
For vacuum compatible stages of the SLC-17 and SLC-24 series that require post-installation baking, we recommend opting for the U-shaped base to increase the overall stiffness of the stage.

Please note that the U-shaped base has the usual mounting hole pattern, but increases the width of the stage itself by 6 mm. This changes the width of an SLC-17 stage to 23 mm and the width of an SLC-24 stage to 30 mm. Omitting the U-shaped base option is only advisable if compactness is the top requirement.

 
Atmospheric Conditions
High Vacuum (HV)
Ultra-High Vacuum (UHV)
Ultra-High Vacuum (UHVT)
Pressure -- Down to 1E-6 mbar Down to 1E-11 mbar Down to 1E-11 mbar
Wiring Teflon-insulated stranded wires with braided shield and Teflon coating Teflon-insulated stranded wires with braided shield Kapton-insulated stranded wires Teflon-insulated stranded wires with braided shield
Grease Standard grease HV compatible grease Grease-free Grease-free
Sensor Options S, L, I S S S
Bake-Out Temperatur -- Up to 130°C upon request Recommended 130°C (max. 150°C) Recommended 130°C (max. 150°C)
Vacuum Feedthrough -- LEMO feedthroughs
- O-ring tightened by a screw nut
- Flanges available upon request
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request