The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system.
TRIPOD 52-6DoF
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 31 (X); 31 (Y); 5 (Z) |
| Travel [°] | 17 (Θx); 19 (Θy); unlimited (Θz) |
| Max. Normal Force [N] | 5 |
| Max. Horizontal Force [N] | 2.5 |
| Dimensions [mm] | 88 x 61 (64 x 61 without base plate) |
| Height of Platform above Ground [mm] | 81 |
| Weight [g] | ~ 550 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Types | S |
| Smallest Increment [nm] | 1 |
| Smallest Increment [µrad] | 1 |
| Closed-Loop Repeatability, Full Stroke MCS2 [nm] | < ± 200 |
| Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] | < ± 10 |
| Closed-Loop Repeatability, Full Stroke MCS2 [µrad] | < ± 15 |
| Options | |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |
Accessories
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