TRIPOD 52-6DoF

The TRIPOD 52-6DoF is compatible with the SLS-52 Modular System and consists of a tip-tilt stage, like its larger equivalent, the TRIPOD 92-6DoF

The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two SLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system.

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Download PDF	Mechanical
Mechanical
Travel [mm]	31 (X); 31 (Y); 5 (Z)
Travel [°]	17 (Θx); 19 (Θy); unlimited (Θz)
Max. Normal Force [N]	5
Max. Horizontal Force [N]	2.5
Dimensions [mm]	88 x 61 (64 x 61 without base plate)
Height of Platform above Ground [mm]	81
Weight [g]	~ 550
	Closed-Loop
Closed-Loop
Sensor Types	S
Smallest Incerement [nm]	1
Smallest Incerement [µrad]	1
Closed-Loop Repeatability [nm]	< ± 200 (Full Travel Range); < ± 15 (1mm Linear Travel)
Closed-Loop Repeatability [µrad]	< ± 10
	Options
Options
Vacuum Options	HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic Option	Yes (-NM)