The TRIPOD 52-6DoF is compatible with the CLS-52 Modular System and consists of a tip-tilt stage, like its larger equivalent, the TRIPOD 92-6DoF

The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system.

Values for rotational travel are given for a Pivot point at the surface of the top plate.

  • Technical-Drawing_TRIPOD 52-6DoF
    Mar 02, 2022
  • Step-file_TRIPOD 52-6DoF
    Dec 15, 2021


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 31 (X); 31 (Y); 6 (Z)
Travel [°] 20 (Θx); 19 (Θy); 360 (Θz)
Max. Normal Force [N] 5
Max. Horizontal Force [N] 2.5
Dimensions [mm] 90 x 90
Height of Platform above Ground [mm] 79.5
Weight [g] 490
Sensor Types S
Smallest Increment [nm] 1
Smallest Increment [µ°] 3
Uni-Directional Repeatability MCS2 [nm] < ± 200
Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] < ± 10
Uni-Directional Repeatability MCS2 [µ°] < ± 15
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes (-NM)


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