TRIPOD 52-6DoF

The TRIPOD 52-6DoF is compatible with the CLS-52 Modular System and consists of a tip-tilt stage, like its larger equivalent, the TRIPOD 92-6DoF

The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system.

Values for rotational travel are given for a Pivot point at the surface of the top plate.

Test

Feb 24, 2022

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Technical-Drawing_TRIPOD 52-6DoF

Mar 02, 2022

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Step-file_TRIPOD 52-6DoF

Dec 15, 2021

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Specifications

Download Spec Sheet

Download Spec Sheet	Mechanical
Mechanical
Travel [mm]	31 (X); 31 (Y); 6 (Z)
Travel [°]	20 (Θx); 19 (Θy); 360 (Θz)
Max. Normal Force [N]	5
Max. Horizontal Force [N]	2.5
Dimensions [mm]	90 x 90
Height of Platform above Ground [mm]	79.5
Weight [g]	490
	Closed-Loop
Closed-Loop
Sensor Types	S
Smallest Increment [nm]	1
Smallest Increment [µ°]	3
Uni-Directional Repeatability MCS2 [nm]	< ± 200
Uni-Directional Repeatability, 1 mm Travel MCS2 [nm]	< ± 10
Uni-Directional Repeatability MCS2 [µ°]	< ± 15
	Options
Options
Vacuum Options	HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option	Yes (-NM)