SMS-20-20 - Rectangular Aperture

The SMS-20-20 consist of two perpendicular oriented single slits. Fully motorized to precisely define the size and position of the rectangular aperture.

Four independently movable blades aligned in two parallel pairs oriented rectangular to each other. The setup allows to define the size of the aperture opening independently in width and height with a side length from 0 to 20 mm. Position sensors allow for closed-loop positioning of each blade to precisely define the size and the position of the aperture within the 20 by 20 mm window of the enclosure. Specialized versions are available for the use in high and ultra-high vacuum environments. Customized versions are also available. Please do not hesitate to contact us to discuss your specific requirements.

  • Technical-Drawing_SMS-20-20
    Jul 05, 2019
  • Step-file_SMS-20-20
    Jul 05, 2019


Download Spec Sheet
Download Spec Sheet Mechanical
Dimensions [mm] 75 x 75 x 20
Weight [g] 275
Velocity [mm/s] > 20
Open-Loop Resolution [nm] < 1
Sensor Resolution MCS2 [nm] 1 (S) 4 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability (H)CU [nm] ± 300 (L)
Material Options Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes (-NM)


Any questions?
Contact us!


Technical Sales