SMS-20-20 - Rectangular Aperture

The SMS-20-20 consist of two perpendicular oriented single slits. Fully motorized to precisely define the size and position of the rectangular aperture.

Four independently movable blades aligned in two parallel pairs oriented rectangular to each other. The setup allows to define the size of the aperture opening independently in width and height with a side length from 0 to 20 mm. Position sensors allow for closed-loop positioning of each blade to precisely define the size and the position of the aperture within the 20 by 20 mm window of the enclosure. Specialized versions are available for the use in high and ultra-high vacuum environments. Customized versions are also available. Please do not hesitate to contact us to discuss your specific requirements.

  • Technical-Drawing_SMS-20-20
    Jul 05, 2019
  • Step-file_SMS-20-20
    Jul 05, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Dimensions [mm] 75 x 75 x 20
Weight [g] 275
  Open-loop
Open-loop
Velocity [mm/s] > 20
Open-Loop Resolution [nm] < 1
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S) 4 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability (H)CU [nm] ± 300 (L)
  Options
Options
Material Options Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes (-NM)

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