XYZ-SLC17:22
Spezifikationen
PDF-Download
| PDF-Download | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 3 |
| Stages used | SLC-1720 |
| Travel [mm] | 12 (X); 12 (Y); 12 (Z) |
| Payload [N] | 1.5 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 65 x 65 x 41 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 30 (24 ... 36) |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 34 x 22 x 36 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 25 (19 ... 31) |
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