SMARFLEX Technology

SMARFLEX nanopositioning scanner stages use the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm. For scanning applications such as AFM, SMARFLEX scanning stages feature maximum scanning speed and minimum scanning error. Also in the field of optical microscopy, focal points can be set accuratly, mirrors can be tilted very precisely or optical fibers can be coupled.

High Resolution

Integrated position sensing provides closed-loop positioning with sub-nm resolution.

Friction-Free Motion

Because flexures are free of friction, no maintenance of wear parts is required. Furthermore, this leads to motion with very high repeatability.

Non-Magnetic Materials

Flexure stages are available in non-magnetic material versions.

Highly Dynamic

Because of the small mass to driving force ratio, a highly dynamic motion can be realized.

Minimized Parasitic Motion

FEM-optimized flexures precisely guide the motion and reduce motion orthogonal to the intended direction.

Vibration-Free Motion

The motion principle is based on lever amplified piezo actuators making a continuous and vibration free motion possible.


Scan Range: > 60 μm
Scan Direction: X
Dimensions: 32 x 32 x 12 mm


Scan Range: > 60 μm
Scan Direction: Z
Dimensions: 32 x 32 x 15 mm


Scan Range: > 200 μm
Scan Direction: X
Dimensions: 52 x 52 x 15 mm


Scan Range: > 60 μm
Scan Direction: X and Y
Dimensions: 32 x 32 x 20 mm